Tungsten, Molybdenum Parts of MOCVD Epitaxy Equipment and Semiconductor
Semiconductor epitaxy equipment refractory tungsten molybdenum parts: GaN - MOCVD equipment set precision machinery, electronics, optics, chemistry, computing the multidisciplinary is an organic whole, is a high degree of automation, the price is expensive, high technology integration of cutting-edge optoelectronic specialized equipment, used for GaN epitaxial growth of semiconductor materials and the manufacture of light-emitting diode (LED) chip. MOCVD equipment dedicated tungsten, molybdenum parts: upper and lower heat insulation piece, tungsten heater in middle, CLP plate, shutter valve insulation, cooling and heat insulation board such as deep processing products.
